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OOO NPO "Termodinamika 3000"
Manufacturer of Organometallic compounds of various levels of complexity
For communication
Russia, 606024, Nizhny Novgorod region, Dzerzhinsk, Panfilovtsev str., 15, office 3
Silicon (IV) fluoride 99.9%
Chemical information:
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CAS number
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7783-61-1
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Synonyms
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Perfluorosilane
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Appearance
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COLOURLESS GAS , WITH PUNGENT ODOUR.
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Vapor Density
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3.57 (gas, air = 1) @ 15 °C
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Color/Form
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COLORLESS GAS
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Melting point
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-90°C
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Molecular Formula
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F4Si
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Molecular Weight
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104.079113g/mol
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Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.
Safety Information:
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Hazard Class
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2.3
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UN
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1859
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Pictogram(s)
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 |
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Signal Word
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DANGER
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OOO NPO "Termodinamika 3000"
Manufacturer of Organometallic compounds of various levels of complexity
Russia, 606024, Nizhny Novgorod region, Dzerzhinsk, Panfilovtsev str., 15, office 3
Спасибо! Форма отправлена